{"created":"2023-05-15T14:48:06.430318+00:00","id":65930,"links":{},"metadata":{"_buckets":{"deposit":"c9ab5af2-cc09-4015-916a-10a8ea406ba1"},"_deposit":{"created_by":1,"id":"65930","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"65930"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00065930","sets":["10:29"]},"author_link":["649442","649441","649439","649437","649440","649438"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2016-06-14","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"電子顕微鏡と組み合わせた軟X線回折格子分光器が局所領域からの発光ペクトルの高効率・高分解・パラレル検出に有効であることは実証されている。この装置によるボロン（B）のK発光線（波長：6.76 nm、エネルギー：183.3 eV）における検出限界は20 ppm程度で、既存の他の分光法に比較して一桁以上高感度であるが、高張力鋼（ハイテン）中のBのppmレベルの精度での含有量計測などの微量分析のためには更なる感度の向上を図る必要がある。このためB-Kにおける回折格子の回折効率をさらに向上させるため、ダイヤモンドライクカーボン(DLC)とTiO2等の酸化膜を金属膜表面上に堆積した場合について理論的に検討した。仮定した回折格子はラミナー型で、刻線密度：1200本/mm、デューティ比：0.3、溝深さ：16 nm、基板：SiO2、表面物質：Ni、入射角：86°とした。上記の回折格子上にDLC、TiO2膜をB-Kで最大効率が得られる膜厚（それぞれ25nmと24nm）で堆積した場合とNi、Au表面の場合の回折効率の比較について述べる。","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"日本顕微鏡学会第72回学術講演会（JSM2016）","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"小池, 雅人"}],"nameIdentifiers":[{"nameIdentifier":"649437","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"小池, 雅人"}],"nameIdentifiers":[{"nameIdentifier":"649438","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"長野, 哲也"}],"nameIdentifiers":[{"nameIdentifier":"649439","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"笹井, 浩行"}],"nameIdentifiers":[{"nameIdentifier":"649440","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"浮田, 龍一"}],"nameIdentifiers":[{"nameIdentifier":"649441","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"小池 雅人","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"649442","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"ボロン発光分光計測用高回折効率軟X線ラミナー型回折格子の設計","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"ボロン発光分光計測用高回折効率軟X線ラミナー型回折格子の設計"}]},"item_type_id":"10005","owner":"1","path":["29"],"pubdate":{"attribute_name":"公開日","attribute_value":"2016-07-28"},"publish_date":"2016-07-28","publish_status":"0","recid":"65930","relation_version_is_last":true,"title":["ボロン発光分光計測用高回折効率軟X線ラミナー型回折格子の設計"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T20:54:42.386896+00:00"}