@misc{oai:repo.qst.go.jp:00062928, author = {Kamiya, Tomihiro and Ishii, Yasuyuki and Satoh, Takahiro and Oikawa, Masakazu and Okubo, Takeshi and Haga, Jyunji and et.al and 及川 将一}, month = {Jul}, note = {11th International conference on nuclear microprobe technology and applications}, title = {Fabrication of Nanostructures by TIARA High-energy Ion Microbeam Systems}, year = {2008} }