{"created":"2023-05-15T14:43:00.014134+00:00","id":58915,"links":{},"metadata":{"_buckets":{"deposit":"dd397f2d-5a1e-4cdc-b879-820169a3e3f6"},"_deposit":{"created_by":1,"id":"58915","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"58915"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00058915","sets":["11"]},"author_link":["586972","586973"],"item_10004_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2018-12","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"6","bibliographicPageStart":"3","bibliographicVolumeNumber":"111","bibliographic_titles":[{"bibliographic_title":"RadTech Japan NEWS LETTER"}]}]},"item_10004_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"RadTech　Japna　NEWS　LETTERの「新技術紹介」コーナーにおいて、量子ビームによる金属ナノ粒子を含有した微細パターンの直接形成を紹介した。従来の光リソグラフィでは短波長化の限界のため、極端紫外光（EUV）のような量子ビームが次期露光源として有望視されている。その露光源のシフトに伴って、革新的な材料・プロセスの研究・開発が求められている。本稿では、還元剤を使用することなく、金属イオンを含有したポリマー薄膜に電子ビーム照射後、加熱するだけで金属ナノ粒子を含有した微細パターンの直接形成について紹介した。","subitem_description_type":"Abstract"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"山本, 洋揮"}],"nameIdentifiers":[{"nameIdentifier":"586972","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"山本 洋揮","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"586973","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"量子ビームによる金属ナノ粒子を含有した微細パターンの直接形成","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"量子ビームによる金属ナノ粒子を含有した微細パターンの直接形成"}]},"item_type_id":"10004","owner":"1","path":["11"],"pubdate":{"attribute_name":"公開日","attribute_value":"2018-12-14"},"publish_date":"2018-12-14","publish_status":"0","recid":"58915","relation_version_is_last":true,"title":["量子ビームによる金属ナノ粒子を含有した微細パターンの直接形成"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T22:10:47.729715+00:00"}