{"created":"2023-05-15T14:42:54.379884+00:00","id":58788,"links":{},"metadata":{"_buckets":{"deposit":"73d51870-9cda-4a5f-9f7a-d72e5f3e72c9"},"_deposit":{"created_by":1,"id":"58788","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"58788"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00058788","sets":["11"]},"author_link":["586369","586372","586371","586370"],"item_10004_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2017-11","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"4","bibliographicPageEnd":"309","bibliographicPageStart":"306","bibliographicVolumeNumber":"22","bibliographic_titles":[{"bibliographic_title":"SPring-8/SACLA利用者情報"}]}]},"item_10004_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"窒化ガリウム（GaN）薄膜の成長初期にのみ発現する特異な格子変形現象を報告する。SPring-8、量研（QST）専用ビームラインBL11XUでは、結晶成長装置とX線回折計が一体化した独自のその場測定装置を有している。本研究は、GaN薄膜成長中のその場X線回折を原子層オーダーの膜厚分解能で測定し、GaNの面内および面内垂直方向の格子間隔の変化を詳細に調べた。その結果、膜厚数ナノメートルの成長初期にのみ、従来の弾性変形とは異なる特異な格子変形を見出した。","subitem_description_type":"Abstract"}]},"item_10004_relation_17":{"attribute_name":"関連サイト","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"https://user.spring8.or.jp/sp8info/?p=35122"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://user.spring8.or.jp/sp8info/?p=35122","subitem_relation_type_select":"URI"}}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"佐々木, 拓生"}],"nameIdentifiers":[{"nameIdentifier":"586369","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"高橋, 正光"}],"nameIdentifiers":[{"nameIdentifier":"586370","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"佐々木 拓生","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"586371","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"高橋 正光","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"586372","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"その場X線回折による窒化物半導体薄膜の結晶成長観察","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"その場X線回折による窒化物半導体薄膜の結晶成長観察"}]},"item_type_id":"10004","owner":"1","path":["11"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-11-03"},"publish_date":"2017-11-03","publish_status":"0","recid":"58788","relation_version_is_last":true,"title":["その場X線回折による窒化物半導体薄膜の結晶成長観察"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T22:12:10.367545+00:00"}