@article{oai:repo.qst.go.jp:00058702,
 author = {Okada, Michio and 寺岡, 有殿 and 寺岡 有殿},
 journal = {Encyclopedia of Semiconductor Nanotechnology, Volume 4, Chapter 2, Molecular-beam controlled chemical reactions on Si surfaces},
 month = {Mar},
 note = {超音速分子線と配向分子線を用いたシリコンの表面反応について、分子線の原理、実験方法、結果と考察を詳しく解説した。},
 title = {Encyclopedia of Semiconductor Nanotechnology, Volume 4, Chapter 2, Molecular-beam controlled chemical reactions on Si surfaces},
 year = {2017}
}