@inproceedings{oai:repo.qst.go.jp:00054898,
 author = {今園, 孝志 and 今園 孝志},
 book = {Springer Proceedings in Physics},
 month = {May},
 note = {For the purpose of monitoring the intensity of laser-driven plasma soft X-ray laser (XRL) as well as providing an intense beam for XRL applications, the use of an X-ray photodiode detector coated with a Mo/Si multilayer mirror with high reflectance has been proposed and fabricated. The s-polarized reflectance of the multilayer-coated photodiode, MP, was measured to be 52.5% at an angle of incidence of 45° with synchrotron radiation at a wavelength of 13.9 nm. The transmittance of MP was 8.96%, which was defined as the ratio of the photodiode current measured at 45° to that at normal incidence. Moreover, with XRL pulses it is found that there is a strong correlation of 0.961 between the reflectance and transmittance of MP. These results indicate that the MP serves as a high reflectivity beam splitter with an X-ray detector enabling to be used for XRL applications.},
 pages = {309--313},
 publisher = {Springer International Publishing},
 title = {Mo/Si Multilayer-Coated Photodiode Detector for Monitoring Soft X-Ray Laser Intensity},
 volume = {202},
 year = {2018}
}