@inproceedings{oai:repo.qst.go.jp:00054827, author = {Faenov, A. and Pikuz, T. and 石野, 雅彦 and Inogamov, N. and Zhakhovsky, V. and Skobelev, I. and 長谷川, 登 and 錦野, 将元 and 神門, 正城 and Kodama, R. and 河内, 哲哉 and 石野 雅彦 and 長谷川 登 and 錦野 将元 and 神門 正城 and 河内 哲哉}, book = {Proceedings of SPIE}, month = {Jun}, note = {We present an overview of our systematic studies of the surface modifications resulting from the interactions of both single and multiple picosecond soft x-ray laser (SXRL) pulses with materials. We show experimentally the possibility of the precise nanometer size structures formation on their surfaces by ultra-low fluencies of single picosecond SXRL pulse. Theoretical description of surface nanostructures is considered and is shown that such structures are formed after laser illumination in a process of mechanical spallation of ultrathin surface layer of molten metal. Spallation is accompanied by a strong foaming of melt, breaking of foam, and freezing of foam remnants. Those remnants form chaotic nanostructures, which are observed in experiments. Our results demonstrate that tensile stress created in materials by short SXRL pulse can produce spallative ablation of target even for drastically small fluencies, which open new opportunities for material nano processing.}, pages = {102430S-1--102430S-10}, publisher = {SPIE}, title = {Soft x-ray laser ablation of metals and dielectrics}, volume = {10243}, year = {2017} }