@inproceedings{oai:repo.qst.go.jp:00054781,
 author = {今園, 孝志 and 今園 孝志},
 book = {AIP Conference Proceedings},
 issue = {1},
 month = {Jul},
 note = {To develop a flat-field spectrometer with coverage of the 1–3.5 keV range, a wideband Ni/C multilayer grating was invented. The multilayer consists of two kinds of layer structures. One is a conventional periodic multilayer of thickness D1 = 5.6 nm, Ni thickness ratio to the multilayer period γ1 = 0.5 and the number of layers N1 = 79. Both the first and last layers are Ni. The other is a C/Ni bilayer of D2 = 8.4 nm, γ2 = 0.53 and N2 = 2. The first layer is C and then Ni. The aperiodic multilayer from the topmost C/Ni bilayer was coated on a laminar-type grating having an effective grating constant of 1/2400 mm, groove depth of 2.8 nm, and duty ratio (land width/groove period) of 0.5. In a preliminary experiment, the diffraction efficiency was in excess of 0.8% in the energy range of 2.1-3.3 keV and the maximum of 5.4% at 3.1 keV at a constant angle of incidence of 88.54°, which is considerably higher than that of an Au-coated grating before deposition of the multilayer.},
 pages = {040044-1--040044-4},
 publisher = {AIP Publishing},
 title = {Development of a flat-field spectrometer with a wideband Ni/C multilayer grating in the 1-3.5 keV range},
 volume = {1741},
 year = {2016}
}