@inproceedings{oai:repo.qst.go.jp:00053887, author = {村松, 正幸 and 北川, 敦志 and 北條, 悟 and 村松 正幸 and 北川 敦志 and 北條 悟}, book = {Proceedings of the Symposium on Accelerator and Related Technology for Application}, month = {Jun}, note = {The compact ECR ion source with a permanent magnet configuration has been developed at NIRS for a new carbon therapy facility. The Kei2-source was designed for production of C4+ ions; its performance such as beam intensity and stability have already reached the medical requirement. Therefore, the prototype development of the source for medical use is almost finished. We have started a few studies on applications of the source. One is the production in the ECR plasma of fullerenes, modified with various atoms, for new materials. A second one is the production of multiply charged ion for ion implantation. In the paper these basic experiments for modified fullerenes and production of multiply charged ions will be reported.}, pages = {11--12}, title = {小型ECRイオン源の現状}, year = {2007} }