@article{oai:repo.qst.go.jp:00049621,
 author = {山崎, 雄一 and 千葉, 陽史 and 牧野, 高紘 and 佐藤, 真一郎 and 山田, 尚人 and 佐藤, 隆博 and 土方, 泰斗 and 児嶋, 一聡 and -Y., Lee S. and 大島, 武 and 山崎 雄一 and 千葉 陽史 and 牧野 高紘 and 佐藤 真一郎 and 山田 尚人 and 佐藤 隆博 and 大島 武},
 issue = {20},
 journal = {Journal of Materials Research},
 month = {Sep},
 note = {Single photon sources (SPS) are an important building block for realizing quantum technologies for computing, communication, and sensing. For industrialization, electrically controllable color centers acting as SPS are required. We have demonstrated the creation of electrically controllable silicon vacancies (VSis) in the SiC pn junction diode fabricated by proton beam writing (PBW). PBW was successfully used to introduce electrically controllable VSi without degradation of the diode performance. The dependence of the electroluminescence (EL) and photoluminescence (PL) intensities from VSi on H1 fluence revealed that the emission efficiency of EL is less than that of PL. For EL, the supply of carriers (electrons and/or holes) was restricted due to the resistive region around each VSi introduced by PBW. The results suggest that further improvement in the VSi creation process without defects acting as majority carrier removal centers (highly resistive region) and nonradiative centers by optimization of PBW conditions are key points to realize highly sensitive quantum sensors using VSi.},
 pages = {3355--3361},
 title = {Electrically controllable position-controlled color centers created in SiC pn junction diode by proton beam writing},
 volume = {33},
 year = {2018}
}