@article{oai:repo.qst.go.jp:00049312, author = {石井, 保行 and 大久保, 猛 and 柏木, 啓次 and 三宅, 善信 and 石井 保行 and 大久保 猛 and 柏木 啓次}, journal = {AIP Conference Proceedings}, month = {Oct}, note = {A prototype penning ionization gauge ion source has been developed for the installation of a 1-MeV compact ion microbeam system. The ion source must generate an ion beam with high brightness and low energy while consuming a minimum of low electric power consumption and fitting within a small size. A prototype penning ionization gage (PIG) ion source with two electromagnets, which generates an ion beam from high-density plasma in a small volume passing through a cathode with a small through-hole, was designed and constructed. The prototype PIG ion source generated low-energy hydrogen ion beams with the almost same distribution of ion species as a typical PIG ion source in the preliminary tests. The brightnesses of the ion beam with all ion species and proton beam were calculated and estimated to be 80 A/(m2SrV) and 8 A/(m2SrV) using the experimentally measured beam current and on the basis of the ion distribution, respectively. These values are sufficient for the installation in a compact ion microbeam system.}, pages = {080015-1--080015-3}, title = {Development of a prototype PIG ion source with electric magnets for a compact ion microbeam system}, volume = {2011}, year = {2018} }