@article{oai:repo.qst.go.jp:00049232, author = {Brodar, T. and Capan, I. and Radulovic, V. and Snoj, L. and Pastuovic, Z. and Coutinho, J. and Ohshima, Takeshi and 大島 武}, journal = {Nuclear Instruments and Methods in Physics Research B}, month = {Oct}, note = {This paper studies the electrically active deep level defects introduced in epitaxial n-type 4H-SiC layers by epithermal and fast neutrons, using Laplace Deep Level Transient Spectroscopy (Laplace DLTS). While the deep level related to the carbon vacancy has been observed in as-grown material, we observed that epithermal and fast neutrons create additional point defects with energy levels at Ec below 0.40 eV and Ec below 0.70 eV.}, pages = {27--31}, title = {Laplace DLTS study of deep defects created in neutron-irradiated n-type 4H-SiC}, volume = {437}, year = {2018} }