{"created":"2023-05-15T14:37:00.842226+00:00","id":47701,"links":{},"metadata":{"_buckets":{"deposit":"b784dd7b-713a-441f-a05b-55c64454c36b"},"_deposit":{"created_by":1,"id":"47701","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"47701"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00047701","sets":["1"]},"author_link":["478665","478674","478675","478670","478663","478666","478672","478673","478668","478664","478671","478669","478667"],"item_8_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2016-11","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"201","bibliographicPageStart":"197","bibliographicVolumeNumber":"99","bibliographic_titles":[{"bibliographic_title":"Superlattices and Microstructures"}]}]},"item_8_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"We investigated the gamma-ray irradiation effect on 4H-SiC device process-induced defects by photoluminescence (PL) imaging and deep level transient spectroscopy (DLTS). We found that basal plane dislocations (BPDs) that were present before the irradiation were eliminated by gamma-ray irradiation of 1 MGy. The reduction mechanism of BPD was discussed in terms of BPD-threading edge dislocation (TED) transformation and shrinkage of stacking faults. In addition, the entire PL image was gradually darkened with increasing\nabsorbed dose, which is presumably due to the point defects generated by gamma-ray irradiation. We obtained DLTS peaks that could be assigned to complex defects, termed RD series, and found that the peaks increased with absorbed dose.","subitem_description_type":"Abstract"}]},"item_8_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"Elsevier"}]},"item_8_relation_14":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"10.1016/j.spmi.2016.03.005","subitem_relation_type_select":"DOI"}}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"宮崎, 寿基"}],"nameIdentifiers":[{"nameIdentifier":"478663","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"牧野, 高紘"}],"nameIdentifiers":[{"nameIdentifier":"478664","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"武山, 昭憲"}],"nameIdentifiers":[{"nameIdentifier":"478665","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"小野田, 忍"}],"nameIdentifiers":[{"nameIdentifier":"478666","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"大島, 武"}],"nameIdentifiers":[{"nameIdentifier":"478667","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"田中, 雄季"}],"nameIdentifiers":[{"nameIdentifier":"478668","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"神取, 幹朗"}],"nameIdentifiers":[{"nameIdentifier":"478669","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"吉江, 徹"}],"nameIdentifiers":[{"nameIdentifier":"478670","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"土方, 泰斗"}],"nameIdentifiers":[{"nameIdentifier":"478671","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"牧野 高紘","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"478672","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"武山 昭憲","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"478673","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"小野田 忍","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"478674","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"大島 武","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"478675","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Effect of gamma-ray irradiation on the device processinduced defects in 4H-SiC epilayers","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Effect of gamma-ray irradiation on the device processinduced defects in 4H-SiC epilayers"}]},"item_type_id":"8","owner":"1","path":["1"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-04-18"},"publish_date":"2017-04-18","publish_status":"0","recid":"47701","relation_version_is_last":true,"title":["Effect of gamma-ray irradiation on the device processinduced defects in 4H-SiC epilayers"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T23:36:30.831504+00:00"}