@article{oai:repo.qst.go.jp:00047588, author = {Mao, Wei and Udono, Haruhiko and Yamaguchi, Kenji and Terai, Takayuki and Matsuzaki, Hiroyuki and 山口 憲司}, journal = {Thin Solid Films}, month = {May}, note = {In order to realize the photoluminescence of semiconducting beta-FeSi2 homoepitaxial films, surface preparation of single crystalline beta-FeSi2 is of critical importance. An atomically flat and clean substrate surface of beta-FeSi2 was prepared by sputtering with 2 keV Ar+ ions or by heating at 850 degrees C. The structure of the native surface oxide and the removal of this layer were investigated though X-ray photoelectron spectroscopy measurements. No significant deviation from the stoichiometric composition was detected in the surface region. Our results suggest that a surface prepared in this way is an eligible substrate for homoepitaxy of beta-FeSi2.}, pages = {1--6}, title = {X-ray photoelectron spectroscopy studies on single crystalline beta-FeSi2}, volume = {606}, year = {2016} }