@article{oai:repo.qst.go.jp:00045563, author = {Kamiya, Tomihiro and Takano, Katsumasa and Ishii, Yasuyuki and Satoh, Takahiro and Oikawa, Masakazu and Okubo, Takeshi and Haga, Jyunji and Nishikawa, Hiroyuki and Furuta, Yusuke and Uchiya, Naoyuki and Seki, Syuhei and Sugimoto, Masaki and 及川 将一}, issue = {12-13}, journal = {Nuclear Instruments & Methods in Physics Research Section B}, month = {Jun}, pages = {2317--2320}, title = {Fabrication of nanowires by varying energy microbeam lithography using heavy ions at the TIARA}, volume = {267}, year = {2009} }