@article{oai:repo.qst.go.jp:00045287, author = {Kato, Yushi and Kubo, Takashi and Muramatsu, Masayuki and Kitagawa, Atsushi and Yoshida, Yoshikazu and et.al and 加藤 裕史 and 久保 隆史 and 村松 正幸 and 北川 敦志 and 吉田 善一}, issue = {2}, journal = {Review of Scientific Instruments}, month = {Feb}, note = {Multiply charged Fe ions are produced from solid pure material in an electron cyclotron resonance (ECR) ion source. We develop an evaporator by using induction heating with an induction coilwhich is made of bare molybdenum wire partially covered by ceramic beads in vacuum and surrounding and heating directly the pure Fe rod. Heated material has no contact with insulators, so that outgas is minimized. The evaporator is installed around the mirror end plate outside of the ECR plasma with its hole grazing the ECR zone. Helium or argon gas is usually chosen for supporting gas. The multicharged Fe ions up to Fe13+ are extracted from the opposite side of mirror and against the evaporator, and then multicharged Fe ion beam is formed. We compare production of multicharged iron ions by using this new source with our previous methods.}, pages = {02A312-1--02A312-4}, title = {Multicharged iron ions produced by using induction heating vapor source}, volume = {79}, year = {2008} }