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  1. 原著論文

Soft X-ray high diffraction efficiency and spectral flux laminar-type W/B4C multilayer diffraction grating for 300-1000 eV

https://repo.qst.go.jp/records/2001236
https://repo.qst.go.jp/records/2001236
4ebe9fe9-b4b8-4a35-8e83-d143d4589208
アイテムタイプ 学術雑誌論文 / Journal Article(1)
公開日 2024-07-29
タイトル
タイトル Soft X-ray high diffraction efficiency and spectral flux laminar-type W/B4C multilayer diffraction grating for 300-1000 eV
言語 en
言語
言語 eng
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ journal article
著者 Koike Masato

× Koike Masato

Koike Masato

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Hatano Tadashi

× Hatano Tadashi

Hatano Tadashi

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Alexander Pirozhkov

× Alexander Pirozhkov

Alexander Pirozhkov

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Oue Yuki

× Oue Yuki

Oue Yuki

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Murano Takanori

× Murano Takanori

Murano Takanori

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Tsubasa Kakio

× Tsubasa Kakio

Tsubasa Kakio

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Koshiya Shogo

× Koshiya Shogo

Koshiya Shogo

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Kondo Kiminori

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Kondo Kiminori

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Terauchi Masami

× Terauchi Masami

Terauchi Masami

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抄録
内容記述タイプ Abstract
内容記述 Multilayer diffraction gratings were designed to improve detection limit and sensitivity of soft X-ray flat-field spectrograph in a region of 300?1000 eV placing emphasis on Fe-L (705 eV), Cu-L (930 eV), and Zn-L (1012 eV) emissions. For this purpose, spectral flux was used as the performance index which is proportional to the amount of optical flux incident into a detector and correlated with detection sensitivity. A super-mirror-type (SMT) W/B4C multilayer coating (M. Koike et al., Rev.Sci. Instrum. 94, 045109 (2023) ) was employed to improve diffraction efficiency in a wide energy region. The unique feature of the multilayer structure is that the average refractive index as well as the period length of W/B4C layers pairs are increased from the bottom to top of layers. Also, incidence angle and nominal groove density were reduced 86.03° from 88.65° and increased to 3200 lines/mm from 2400 lines/mm of our previous design, respectively, to improve spectral flux while maintaining dispersion and spectral resolution. A holographic varied-line-spacing (VLS) spherical grating and soft X-ray flat-field spectrograph was designed, assuming aspherical-wavefront-recording (AWR) method, assuming the nominal grating constant and incident angle described above. The numerical simulation results showed that the spectrograph employing newly designed grating with the W/B4C multilayer indicated 3.2?8.2 times higher spectral flux comparing with those obtained with the previously designed grating and spectrograph while keeping same spectral resolution.
書誌情報 Review of Scientific Instruments

巻 95, 号 7, p. 073104-1-073104-6, 発行日 2024-07
出版者
出版者 American Institute of Physics
DOI
識別子タイプ DOI
関連識別子 10.1063/5.0210772
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