| アイテムタイプ |
学術雑誌論文 / Journal Article(1) |
| 公開日 |
2024-10-07 |
| タイトル |
|
|
タイトル |
Hydrodynamic simulation of laser ablation with electronic entropy effects included |
|
言語 |
en |
| 言語 |
|
|
言語 |
eng |
| 資源タイプ |
|
|
資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
|
資源タイプ |
journal article |
| 著者 |
Shuto Watanabe
Akashi Ryosuke
Takahiro Ishikawa
Yuta Tanaka
Shinji Tsuneyuki
|
| 抄録 |
|
|
内容記述タイプ |
Abstract |
|
内容記述 |
In this paper, we present a methodology of laser ablation simulation including electronic entropy effects. Ablation by ultrashort laser pulses is suitable for micromachining because of its small thermal damage. To further enhance its effectiveness, it is crucial to explore both theoretically and experimentally the desirable conditions for processing. The density functional theory calculations predict that hot electrons make crystalline lattice thermodynamically unstable at electronic temperature roughly above 20?000?K due to the electronic entropy-driven mechanism. In our simulations, equations combining hydrodynamic equations and the two-temperature model are modeled and are numerically solved, where the electronic entropy effects are included as the electronic temperature-dependent latent heat, boiling point, and melting point. For metal targets, Al and Cu, the calculated ablation rates for 100?fs laser pulses agree with the experimental one at laser fluences up to 10?J/cm ?. The heat-affected zone (HAZ) is numerically evaluated from the thickness of the molten layer. Short pulses produce a high ablation rate and small HAZ because of the suppression of diffusion of the deposited pulse energy. Electronic entropy effects make a clear difference between 100?fs and 10?ps pulses. The calculation method presented in this paper serves as a useful tool for exploring nonequilibrium between electrons and ions in the equation of states for metals such as Al and Cu. |
| 書誌情報 |
Journal of Applied Physics
巻 136,
p. 133104,
発行日 2024-10
|
| 出版者 |
|
|
出版者 |
AIP Publishing LLC |
| DOI |
|
|
|
識別子タイプ |
DOI |
|
|
関連識別子 |
10.1063/5.0210018 |