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Developing a penning ionization gauge ion source with a filament for a compact ion microbeam system
https://repo.qst.go.jp/records/2001209
https://repo.qst.go.jp/records/2001209f4286542-7f45-43b8-aced-c406fead3288
| アイテムタイプ | 学術雑誌論文 / Journal Article(1) | |||||||||||
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| 公開日 | 2024-05-24 | |||||||||||
| タイトル | ||||||||||||
| タイトル | Developing a penning ionization gauge ion source with a filament for a compact ion microbeam system | |||||||||||
| 言語 | en | |||||||||||
| 言語 | ||||||||||||
| 言語 | eng | |||||||||||
| 資源タイプ | ||||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||
| 資源タイプ | journal article | |||||||||||
| 著者 |
Ishii Yasuyuki
× Ishii Yasuyuki
× Okubo Takeru
× Saito Yuichi
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| 抄録 | ||||||||||||
| 内容記述タイプ | Abstract | |||||||||||
| 内容記述 | We present the development of a penning ionization gauge ion source with a filament (F-PIG) for producing submicron ion beams in a compact ion microbeam system. The conventional penning ionization gauge ion source (PIG) represents a viable choice for microbeam system due to its compact size and low power consumption. However, directly utilizing a PIG for generating submicron ion beam poses challenges, primarily from significant energy spread, causing substantial aberrations. Considering this, this study proposes a solving the generation of low-voltage discharge plasma, achieved using low-energy electrons from a filament by focusing on the development of F-PIG for this purpose. Experimental results demonstrate that the F-PIG exhibits considerable promise an ion source to forming submicron beam within a compact ion microbeams system. These findings indicate that F-PIG can effectively reduce the width of the beam energy spread, making it a valuable asset for microbeam applications. | |||||||||||
| 書誌情報 |
IOP Science home Accessibility Help Journals Books Publishing Support Login Journal of Physics: Conference Series 巻 2743, 発行日 2024-05 |
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| 出版者 | IOP SCIENCE | |||||||||||
| DOI | ||||||||||||
| 識別子タイプ | DOI | |||||||||||
| 関連識別子 | 10.1088/1742-6596/2743/1/01201 | |||||||||||
