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  1. 原著論文

Sub-nanometer scale depth patterning on Sapphire crystal by femtosecond soft x-ray laser pulse irradiation

https://repo.qst.go.jp/records/2000768
https://repo.qst.go.jp/records/2000768
e4d04f00-c8c9-4965-90cb-b4c4ef20678e
アイテムタイプ 学術雑誌論文 / Journal Article(1)
公開日 2024-12-19
タイトル
タイトル Sub-nanometer scale depth patterning on Sapphire crystal by femtosecond soft x-ray laser pulse irradiation
言語 en
言語
言語 eng
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ journal article
著者 Mikami Kazuhiro

× Mikami Kazuhiro

Mikami Kazuhiro

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Ishino Masahiko

× Ishino Masahiko

Ishino Masahiko

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Motoyama Hiroto

× Motoyama Hiroto

Motoyama Hiroto

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Thanhhung Dinh

× Thanhhung Dinh

Thanhhung Dinh

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Yokomae Shunya

× Yokomae Shunya

Yokomae Shunya

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Yamaguchi Gota

× Yamaguchi Gota

Yamaguchi Gota

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Egawa Satoru

× Egawa Satoru

Egawa Satoru

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Sakaue Kazuyuki

× Sakaue Kazuyuki

Sakaue Kazuyuki

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Mimura Hidekazu

× Mimura Hidekazu

Mimura Hidekazu

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Higashiguchi Takeshi

× Higashiguchi Takeshi

Higashiguchi Takeshi

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Kubota Yuya

× Kubota Yuya

Kubota Yuya

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Owada Shigeki

× Owada Shigeki

Owada Shigeki

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Iwasaki Atsushi

× Iwasaki Atsushi

Iwasaki Atsushi

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Inubushi Yuichi

× Inubushi Yuichi

Inubushi Yuichi

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Nishikino Masaharu

× Nishikino Masaharu

Nishikino Masaharu

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抄録
内容記述タイプ Abstract
内容記述 Damage thresholds and structures on a metal aluminum and an aluminum oxide crystal induced by the soft x-ray free electron laser irradiations were evaluated. Distinctive differences in damage thresholds and structures were observed for these materials. On the aluminum oxide crystal surface, in particular a novel surface processing, which we suggest defining as “Peeling”, was recognized. Surface structures formed by peeling had extremely shallow patterning of sub-nanometer depth. For the newly observed peeling process, we proposed a scission of chemical bond, i.e., binding energy model, in the crystal.
書誌情報 Optics Letters

巻 48, 号 19, p. 5041-5044, 発行日 2023-09
出版者
出版者 Optical Publishing Group
ISSN
収録物識別子タイプ ISSN
収録物識別子 1539-4794
DOI
識別子タイプ DOI
関連識別子 10.1364/OL.501589
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