| アイテムタイプ |
学術雑誌論文 / Journal Article(1) |
| 公開日 |
2024-08-08 |
| タイトル |
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タイトル |
Design of soft X-ray laminar-type gratings coated with supermirror-type multilayer to enhance diffraction efficiency in a region of 2?4 keV |
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言語 |
en |
| 言語 |
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言語 |
eng |
| 資源タイプ |
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資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
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資源タイプ |
journal article |
| 著者 |
小池 雅人
羽多野 忠
Alexander Pirozhkov
上野 良弘
寺内 正己
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| 抄録 |
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内容記述タイプ |
Abstract |
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内容記述 |
Soft X-ray diffraction gratings coated with supermirror-type multilayer was designed to enhance diffraction efficiency in an energy range of 2?4 keV by means of numerical calculation. Optimized groove depth and incidence angle are 2.05 nm and 88.65?, respectively, for the grating having a groove density of 3,200 grooves/mm. Regarding the multilayer structure, the optimum number of B4C/W layers pair was 11 and the thickness of B4C was increased from bottom to top while that of W was kept a constant value. The replacement of the top layer of W by either Co, Cr, or Ni was effective means to obtain uniform diffraction efficiency. In the region of 2?4 keV, the calculated diffraction efficiency of the designed gratings was up to ca. 5.3 % on average and almost eight times larger than that of ca. 0.7 % of an Au coated grating. |
| 書誌情報 |
Rev. Sci. Insitrum.
巻 94,
号 4,
p. 045109-1-045109-5,
発行日 2023-04
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| 出版者 |
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出版者 |
AIP Publishing |
| ISSN |
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収録物識別子タイプ |
ISSN |
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収録物識別子 |
0034-6748 |
| DOI |
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識別子タイプ |
DOI |
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関連識別子 |
10.1063/5.0148908 |