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表面汚染検査装置及び検査方法
https://repo.qst.go.jp/records/74314
https://repo.qst.go.jp/records/743143f560f47-39d4-41e9-a306-cc982ccc9fa1
名前 / ファイル | ライセンス | アクション |
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公開広報 (115.7 kB)
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特許公報 (3.2 MB)
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Item type | 特許 / Patent(1) | |||||
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公開日 | 2019-02-28 | |||||
タイトル | ||||||
タイトル | 表面汚染検査装置及び検査方法 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_1843 | |||||
資源タイプ | other | |||||
共願 | ||||||
値 | - | |||||
公開番号 | ||||||
値 | 2008-101922 | |||||
公開日 | ||||||
日付 | 2008-05-01 | |||||
特許番号 | ||||||
値 | 4469962 | |||||
登録日 | ||||||
日付 | 2010-03-12 | |||||
分類 | ||||||
値 | 環境計測・環境・防護 |