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Induction Heating Pure Vapor Source of High Temperature Melting Point Materials on Electron Cyclotron Resonance Ion Source
https://repo.qst.go.jp/records/45823
https://repo.qst.go.jp/records/45823bd4ef2ae-80f9-4794-b72e-d2cbc2ffdf78
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2010-06-16 | |||||
| タイトル | ||||||
| タイトル | Induction Heating Pure Vapor Source of High Temperature Melting Point Materials on Electron Cyclotron Resonance Ion Source | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
Kutsumi, Osamu
× Kutsumi, Osamu× Kato, Yushi× Matsui, Yuki× Kitagawa, Atsushi× Muramatsu, Masayuki× Uchida, Takashi× Yoshida, Yoshikazu× Sato, Fuminobu× Iida, Toshiyuki× 加藤 裕史× 松井 祐樹× 北川 敦志× 村松 正幸× 吉田 善一 |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Multicharged ions that are needed are produced from solid pure material with high melting point in an electron cyclotron resonance ion source. We develop an evaporator by using induction heating (IH) with multilayer induction coil, which is made from bare molybdenum or tungsten wire without water cooling and surrounding the pure vaporized material. We optimize the shapes of induction coil and vaporized materials and operation of rf power supply. We conduct experiment to investigate the reproducibility and stability in the operation and heating efficiency. IH evaporator produces pure material vapor because materials directly heated by eddy currents have no contact with insulated materials, which are usually impurity gas sources. The power and the frequency of the induction currents range from 100 to 900 W and from 48 to 23 kHz, respectively. The working pressure is about 10Pa. We measure the temperature of the vaporized materials with different shapes, and compare them with the result of modeling. We estimate the efficiency of the IH vapor source. We are aiming at the evaporator's higher melting point material than that of iron. | |||||
| 書誌情報 |
Review of Scientific Instruments 巻 81, 号 2, p. 02A322-1-02A322-3, 発行日 2010-02 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0034-6748 | |||||
| 関連サイト | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://rsi.aip.org/rsinak/v81/i2/p02a322_s1 | |||||
| 関連名称 | http://rsi.aip.org/rsinak/v81/i2/p02a322_s1 | |||||
