量研学術機関リポジトリ「QST-Repository」は、国立研究開発法人 量子科学技術研究開発機構に所属する職員等が生み出した学術成果（学会誌発表論文、学会発表、研究開発報告書、特許等）を集積しインターネット上で広く公開するサービスです。 Welcome to QST-Repository where we accumulates and discloses the academic research results(Journal Publications, Conference presentation, Research and Development Report, Patent, etc.) of the members of National Institutes for Quantum Science and Technology.
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The compact Energy Recovery Linac (cERL) has been in operation at KEK since 2013 to demonstrate ERL performance and develop ERL technology. Recently KEK has launched an infrared FEL project with a competitive funding. The purpose of this project is to build a mid-infrared FEL at the cERL, and to use that FEL as a light source for construction of the processing database required for industrial lasers. The FEL system is composed of two 3 m undulators and a matching section between them, and generates light with a maximum pulse energy of 1 micro-J at the wavelength of 20 microns with an 81.25 MHz repetition rate. The FEL is also expected to become a proof-of-concept machine for ERL base FELs for future EUV lithography.
会議概要（会議名, 開催地, 会期, 主催者等）
the 12th International Particle Accelerator Conference - IPAC’21
Construction of an infrared FEL at the compact ERL
