量研学術機関リポジトリ「QST-Repository」は、国立研究開発法人 量子科学技術研究開発機構に所属する職員等が生み出した学術成果（学会誌発表論文、学会発表、研究開発報告書、特許等）を集積しインターネット上で広く公開するサービスです。 Welcome to QST-Repository where we accumulates and discloses the academic research results(Journal Publications, Conference presentation, Research and Development Report, Patent, etc.) of the members of National Institutes for Quantum Science and Technology.
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The extension of the roadmap of shorter wavelength extreme ultravi-
olet (EUV) and soft x-ray sources is a topic of considerable interest.
We have studied the optimized emission from high power and/or high
brightness sources based on unresolved transition array (UTA) emis-
sion. The peak UTA wavelengths follow a quasi-Moseley’s law for the laser wavelength of 1064 nm and λ = 165.8 × R^−1(Z − 12.44)−1.94 ∞
nm for the laser wavelength of 532 nm, respectively. The photon flux decreased with increasing atomic number. We also mapped the optimum electron temperatures and corre- sponding charge states required to produce strong soft x-ray UTA emis- sion with a photon flux of the order of 10^14 photons/nm · sr. The present quasi-Moseley’s law is sufficient for identifying the optimum element for numerous applications, such as material ablation and ionization, nano- lithography, and in vivo biological imaging.
Optimized highly charged ion production for strong soft x-ray sources obeying a quasi-Moseley’s law
