量研学術機関リポジトリ「QST-Repository」は、国立研究開発法人 量子科学技術研究開発機構に所属する職員等が生み出した学術成果(学会誌発表論文、学会発表、研究開発報告書、特許等)を集積しインターネット上で広く公開するサービスです。 Welcome to QST-Repository where we accumulates and discloses the academic research results(Journal Publications, Conference presentation, Research and Development Report, Patent, etc.) of the members of National Institutes for Quantum Science and Technology.
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Multilayer coating is an effective method to enhance spectral flux at an interested spectral range. We have initiated feasibility studies to explore the methods to enhance spectral flux essentially by not only increasing diffraction efficiency but also getting rid of a restriction of traditional used incidence angle. In the present study, we assumed the Ni-coated laminar-type gratings having groove density of 1200 lines/mm, and investigated the overcoatings of La series materials. To overcome the issue that the deposited La surface is easily oxidized to smash in air, we employed chemically stable LaF3 and metallic lanthanum with a carbon protective cap layer, La/C. The measured maximum diffraction efficiencies were 0.178, 0.294, and 0.343 at the angles of incidence of α = 84.42°, 85.19°, and 84.83° for the gratings having Ni, Ni/LaF3, and La/C coatings, respectively. The gains of the receivable incidence flux proportional to cosα are 1.9, 1.6, and 1.8 times, and finally the enhancements of diffracted spectral flux are 2.5, 3.5 and 4.4 times compared to that of the Au-coated grating at α = 87.07°, respectively.
会議概要(会議名, 開催地, 会期, 主催者等)
The 15th Symposium of Japanese Research Community on X-ray Imaging Optics