量研学術機関リポジトリ「QST-Repository」は、国立研究開発法人 量子科学技術研究開発機構に所属する職員等が生み出した学術成果（学会誌発表論文、学会発表、研究開発報告書、特許等）を集積しインターネット上で広く公開するサービスです。 Welcome to QST-Repository where we accumulates and discloses the academic research results(Journal Publications, Conference presentation, Research and Development Report, Patent, etc.) of the members of National Institutes for Quantum Science and Technology.
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We have been developed aperiodic W/B4C multilayer-coated replica gratings for use in the tender x-ray range 2 to 4 keV. Recently, it became apparent that surface degradation was caused by baking the multilayer gratings at around 60°C. The multilayer structure has been maintained well, whereas the resin surface in which grooves are formed has been significantly deformed. Such degradation has not been observed in conventional gold-coated replica gratings as far as we know. Replica gratings made with a high glass transition temperature resin were prototyped so as to improve heat resistance of multilayer-coated replica gratings. Diffraction efficiencies before and after heat load at 95°C for 60 hours were measured. The fact that the difference in change rate between the peak values was quite slight being less than 3% indicates that the heat resistance has been improved by 30°C.
会議概要（会議名, 開催地, 会期, 主催者等）
13th International Conference on Synchrotron Radiation Instrumentation (SRI2018)
Improvement study on heat resistance of multilayer-coated replica gratings
