量研学術機関リポジトリ「QST-Repository」は、国立研究開発法人 量子科学技術研究開発機構に所属する職員等が生み出した学術成果（学会誌発表論文、学会発表、研究開発報告書、特許等）を集積しインターネット上で広く公開するサービスです。 Welcome to QST-Repository where we accumulates and discloses the academic research results(Journal Publications, Conference presentation, Research and Development Report, Patent, etc.) of the members of National Institutes for Quantum Science and Technology.
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New 10-µm-thick silicon microdosimeters utilizing
3-D technology have been developed and investigated in this
paper. The TCAD simulations were carried out to understand
the electrical properties of the microdosimeters’ design. A charge
collection study of the devices was performed using 5.5-MeV
He2+ ions which were raster scanned over the surface of the
detectors and the charge collection median energy maps were
obtained and the detection yield was also evaluated. The devices
were tested in a 290 MeV/u carbon ion beam at the Heavy
Ion Medical Accelerator in Chiba (HIMAC) in Japan. Based
on the microdosimetric measurements, the quality factor and
dose equivalent out of field were obtained in a mixed radiation
field mimicking the radiation environment for spacecraft in deep
space.
Thin Silicon Microdosimeter Utilizing 3-D MEMS Fabrication Technology: Charge Collection Study and Its Application in Mixed Radiation Fields
